| Sputtering Target | Formula | CAS Number | Available Purities | MSDS File |
|---|---|---|---|---|
| Iron Carbide | Fe3C | 12011-67-5 | 99.9% |  |
| Niobium Carbide | NbC | 12069-94-2 | >99.5% | |
| Molybdenum Carbide | Mo2C | 12069-89-5 | 99.5% | |
| Silicon Carbide | SiC | 409-21-2 | 99.5% | |
| Tantalum Carbide | TaC | 12070-06-3 | 99.5% | |
| Titanium Carbide | TiC | 12070-08-5 | 99.5% | |
| Tungsten Carbide | WC | 12070-12-1 | 99.5%, 99.9% | |
| Vanadium Carbide | VC | 12070-10-9 | 99.5% | |
| Zirconium Carbide | ZrC | 12070-14-3 | 99.5% | |
| Aluminum Fluoride | AlF3 | 7784-18-1 | 99.9%, 99.95%, 99.99% | |
| Barium Fluoride | BaF2 | 7787-32-8 | 99.9%, 99.95%, 99.99% | |
| Cadmium Fuoride | CdF2 | 7790-79-6 | 99.9%, 99.95%, 99.99% | |
| Calcium Fluoride | CaF2 | 7789-75-5 | 99.9%, 99.95%, 99.99% | |
| Cesium Fluoride | CsF | 13400-13-0 | 99.9%, 99.95%, 99.99% | |
| Cerium Fluoride | CeF3 | 7758-88-5 | 99.9%, 99.95%, 99.99% | |
| Chromium Fluoride | CrF3 | 7788-97-8 | 99.9% | |