Stanford Advanced Materials (SAM) provides a wide range of planar sputtering targets for large area deposition and other market applications.
SAM provides standard and custom-made planar sputtering targets. We supply large stock Cr, Ag, Al, Si, Sn, Ti, Stainless steel, TiO2, W, Ta, Mo, Nb, Cu and other metal and alloy materials.
Cast: The planar sputtering targets can be cast directly to a backing plate or bonded. SAM provides material-specific re-casting service.
HIP/Hot-pressed/Sintered: SAM offers a range of targets made using powder-metallurgical and ceramic processing methods. These include, but are not limited to, ATO, AZO, Cr, ITO etc.
Rolled/Forged/Brazed: SAM provides custom engineering and unique thermo-mechanical process solutions (e.g., grain-size control) for various materials.
Round Planar |
Rectangular Planar |
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| Size | Diameter: 50.38 – 381mm (2 – 15 inches) | Length: up to 1700mm (67 inches)
Width: up to 381mm (15 inches) |
| Thickness | up to 15mm (0.591 inches) | up to 15mm (0.591 inches) |
We also offer customized shapes and sizes of planar sputtering targets, please send us an inquiry for more information.
