| Sputtering Target | Formula | CAS Number | Available Purities | MSDS File |
|---|---|---|---|---|
| Aluminum Nitride | AlN | 24304-00-5 | 99.5%, 99.9% |  |
| Chromium Nitride | Cr2N | 12053-27-9 | 99.5%, 99.9% | |
| Boron Nitride | BN | 10043-11-5 | >99.5% | |
| Germanium Nitride | Ge3N4 | 12065-36-0 | 99.9% | |
| Iron Nitride | FeN4 | 37245-77-5 | 99.9% | |
| Hafnium Nitride | HfN | 25817-87-2 | >99.5% | |
| Niobium Nitride | NbN | 24621-21-4 | >99.5% | |
| Silicon Nitride | Si3N4 | 12033-89-5 | 99.5%, 99.9% | |
| Titanium Nitride | TiN | 25583-20-4 | 99.5% | |
| Tantalum Nitride | TaN | 12033-62-4 | >99.5% | |
| Vanadium Nitride | VN | 24646-85-3 | 99.5% | |
| Zinc Nitride | Zn3N2 | 1313-49-1 | 99.9% | |
| Zirconium Nitride | ZrN | 25658-42-8 | 99.5% | |
| Boron Carbide | B4C | 12069-32-8 | 99.5% | |
| Chromium Carbide | Cr3C2 | 12012-35-0 | 99.5% | |
| Hafnium Carbide | HfC | 12069-85-1 | >99.5% | |