| Sputtering Target | Formula | CAS Number | Available Purities | MSDS File |
|---|---|---|---|---|
| Nickel | Ni | 7440-02-0 | 99.9%, 99.99%, 99.995% |  |
| Niobium | Nb | 7440-3-1 | 99.95%, 99.99% | |
| Palladium | Pd | 7440-5-3 | 99.95% | |
| Platinum | Pt | 7440-6-4 | 99.99% | |
| Praseodymium | Pr | 7440-10-0 | 99.9% | |
| Rhenium | Re | 7440-15-5 | 99.99% | |
| Rhodium | Rh | 7440-16-6 | 99.9% | |
| Ruthenium | Ru | 7440-18-8 | 99.95% | |
| Samarium | Sm | 7440-19-9 | 99.9% | |
| Scandium | Sc | 7440-20-2 | 99.9%, 99.95%, 99.99% | |
| Selenium | Se | 7782-49-2 | >99.99%, 99.999% | |
| N-type Silicon | Si | 7440-21-3 | 99.9%, 99.95%, 99.99%, 99.995%, 99.999% | |
| P-type Silicon | Si | 7440-21-3 | 99.9%, 99.95%, 99.99%, 99.995%, 99.999% | |
| Pure Silicon | Si | 7440-21-3 | 99.9%, 99.95%, 99.99%, 99.995%, 99.999% | |
| Silver | Ag | 7440-22-4 | 99.99% | |
| Tantalum | Ta | 7440-25-7 | 99.95% | |