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MSDS3

Material Safety Data Sheets (MSDS) – Page 3

Sputtering Target Formula CAS Number Available Purities MSDS File
Nickel Ni 7440-02-0 99.9%, 99.99%, 99.995%
Niobium Nb 7440-3-1 99.95%, 99.99%
Palladium Pd 7440-5-3 99.95%
Platinum Pt 7440-6-4 99.99%
Praseodymium Pr 7440-10-0 99.9%
Rhenium Re 7440-15-5 99.99%
Rhodium Rh 7440-16-6 99.9%
Ruthenium Ru 7440-18-8 99.95%
Samarium Sm 7440-19-9 99.9%
Scandium Sc 7440-20-2 99.9%, 99.95%, 99.99%
Selenium Se 7782-49-2 >99.99%, 99.999%
N-type Silicon Si 7440-21-3 99.9%, 99.95%, 99.99%, 99.995%, 99.999%
P-type Silicon Si 7440-21-3 99.9%, 99.95%, 99.99%, 99.995%, 99.999%
Pure Silicon Si 7440-21-3 99.9%, 99.95%, 99.99%, 99.995%, 99.999%
Silver Ag 7440-22-4 99.99%
Tantalum Ta 7440-25-7 99.95%